Abstract:The relationship between the rolling and annealing processes and the density, grain size and crystal orientation of molybdenum targets was studied. Molybdenum target was rolled under different process conditions of 60%~90% deformation, and annealed at different temperatures of 900~1200 ℃. The physical and chemical properties and structure of molybdenum target were characterized by precision measurement, metallographic observation, scanning electron microscope imaging (SEM), X-ray diffraction (XRD), electron back scattering diffraction (EBSD) and other methods. The characteristics of molybdenum target, such as density, grain size and crystal orientation, were analyzed and discussed, and the best rolling process of molybdenum target was determined. The results show that when the rolling deformation was 80%~85%, the density of molybdenum target reached 99.8%. After vacuum annealing at 1000 ℃, the microstructure uniformity was the best, the average grain size was 57.1 μm, and the target surface showed a significant {100} crystal surface preferred orientation.